Dual-tube MEMS-based spectrophone for sub-ppb mid-IR photoacoustic gas detection

Publication date: 1 Dic 2024

JournalSource: LEGACY

Nowadays, the scientific community and industry are increasingly pressed to provide solutions for developing compact and highly-performing trace-gas sensors for several applications of crucial importance, such as environmental monitoring or medical diagnostics. In this context, this work describes a novel configuration, making use of a mid-IR spectrophone combining the compactness of a photo-acoustic setup, a non-conventional micro-electro-mechanical (MEMS) acousto-to-voltage transducer, and the sensitivity enhancement given by a cost-effective and easy-to-build dual-tube resonator configuration. In the optimal condition of sample pressure, the system developed in this work can achieve a minimum detection limit (MDL) equal to 0.34 ppb when averaging up to 10 s. Compared with previous literature of single-pass photoacoustic-based sensors for N 2 O, this corresponds to a significant improvement both …

Publisher
Elsevier
Origin
Photoacoustics
Legacy ID
4a5185d3f429236a3b80cb2de57b2191
Biblio references
Volume: 40 Pages: 100644