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Out-of-plane deformation and pull-in voltage of cantilevers with residual stress gradient: experiment and modelling

Publication date: 19 Dic 2018

JournalSource: OPENALEXOpenAlex type: articleClosed Access
Authors: Anna Persano, Jacopo Iannacci, Pietro Aleardo Siciliano, Fabio Quaranta
Origin
Microsystem Technologies
Volume
25
Issue
9
Pages
3581-3588
Cited by
10
Legacy ID
566bd02aa995ba478e7d009f5d509689
Biblio references
Volume: 25 Issue: 9 Pages: 3581-3588
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