Ion implantation and activation of aluminum in bulk 3C-SiC and 3C-SiC on Si

Publication date: 15 Dic 2022

JournalSource: OPENALEXOpenAlex type: articleClosed Access
Authors: Marica Canino, Fabrizio Tamarri, Frank Torregrosa, Mariaconcetta Canino, F. Li, F. Tamarri, B. Roux, S. Morata, Francesco La Via, Marcin Zieliński, Roberta Nipoti
Origin
MRS Advances
Volume
7
Issue
36
Pages
1347-1352
Cited by
5
Legacy ID
bb9e042678b729dcb11e05c4a6666398
Biblio references
Pages: 1-6