U-shaped MEMS tunable microwave resonators

Publication date: 11 Lug 2022

ConferenceSource: LEGACY

Compact, U-shaped microwave resonators have been designed and implemented with RF MEMS switches to obtain frequency tunable narrow-band devices. The U-shape has been used to develop a resonator optimizing its size. In addition, RF MEMS ohmic switches have been introduced to implement the frequency tunability in a small range and to provide a high signal rejection ratio in the ON-OFF states. Device configurations working at frequencies between 20 GHz ca. and 26 GHz ca. have been studied.

Publisher
IEEE
Origin
2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
Legacy ID
d43947cde52e0ab1a7cecbdc47b30159
Biblio references
Pages: 1-5