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Estimation of Activation and Compensation Ratios in Al+ Ion Implanted 4H-SiC: Comparison of Two Methodologies

Publication date: 30 Giu 2022

JournalSource: LEGACY
Authors: Marica Canino, Roberta Nipoti, Fabrizio Tamarri, Virginia Boldrini
Publisher
Trans Tech Publications Ltd
Origin
Materials Science Forum
Legacy ID
7fcfc15abefc34966cb52f89f6e2c175
Biblio references
Volume: 1062 Pages: 241-245
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