Analysis of the electrical activation data in thermally annealed implanted Al/4H–SiC systems: A novel approach based on cooperativity

Publication date: 1 Set 2022

JournalSource: LEGACY
Publisher
Pergamon
Origin
Materials Science in Semiconductor Processing
Legacy ID
cfbf6eed4f742832cd3e4239a9bb95c0
Biblio references
Volume: 148 Pages: 106825