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Correlation between Q-Factor and Residual Stress in Epitaxial 3C-SiC Double-Clamped Beam Resonators

Publication date: 26 Giu 2023

JournalSource: LEGACY
Authors: Sergio Sapienza, Alberto Roncaglia, Diego Marini, Francesco La Via, Luca Belsito
Publisher
Trans Tech Publications Ltd
Origin
Materials Science Forum
Legacy ID
bc9470d5ad1170dccc05736dbbef3745
Biblio references
Volume: 1089 Pages: 57-61
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