Status of 3 <scp>C</scp> ‐ <scp>SiC</scp> Growth and Device Technology

Publication date: 29 Ott 2021

otherSource: OPENALEXOpenAlex type: otherClosed Access
Authors: Peter J. Wellmann, Michael Schöler, Philipp Schuh, Mike Jennings, Fan Li, Roberta Nipoti, Andrea Severino, Ruggero Anzalone, Fabrizio Roccaforte, Massimo Zimbone, Francesco La Via

Since the early days of research in the field of the wide band gap semiconductor silicon carbide (SiC), the cubic polytype has been favorable because it exhibits the highest electron mobility. The electronic band gap and electric breakdown are slightly smaller than the hexagonal 4H-SiC. Therefore, the ideal operation range of power electronic devices based on 3C-SiC lies in the mid-voltage range of 400–600 V as it is used in the large application field of electric automotive applications. The current review presents a state-of-the-art overview over the complete processing change from materials growth to device processing.

Origin
OpenAlex
Pages
93-136
Cited by
1