Multi-photon lithography on thin films for efficient fabrication of 2D and 2.5D meta-atoms

Publication date: 1 Set 2025

JournalSource: OPENALEXOpenAlex type: articleClosed Access
Authors: Savvas Papamakarios, Gordon Zyla, Dimitrios Zografopoulos, Anna Christoforidou, George Kenanakis, Maria Farsari, Odysseas Tsilipakos

Direct laser writing (DLW) has arise interest in a variety of fields due to the capabilities that we get from the realization of 2D and 3D structures with high resolution fabrication techniques. Multi-photon lithography (MPL) relies on non-linear absorption effects, making possible the fabrication of metasurfaces with feature size beyond the diffraction limit. A new approach in this direction is to use thin films in order to fabricate planar surfaces, known as metasurfaces, that can manipulate light in different forms and can provide a new process with significant advantages in fabrication time, the cost and the usage of masks compared to conventional lithographic techniques.

Origin
OpenAlex
Pages
X-260
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