Structural and Electrical Properties of Annealed Ge2Sb2Te5 Films Grown on Flexible Polyimide

Publication date: 10 Giu 2022

JournalSource: OPENALEXOpenAlex type: articleOpen Access
Authors: M. Bertelli, Adriano Díaz Fattorini, Sara De Simone, Sabrina Calvi, Riccardo Plebani, Valentina Mussi, F. Arciprete, Raffaella Calarco, Massimo Longo

The morphological, structural, and electrical properties of as-grown and annealed Ge2Sb2Te5 (GST) layers, deposited by RF-sputtering on flexible polyimide, were studied by means of optical microscopy, atomic force microscopy, X-ray diffraction, Raman spectroscopy, and electrical characterization. The X-ray diffraction annealing experiments showed the structural transformation of GST layers from the as-grown amorphous state into their crystalline cubic and trigonal phases. The onset of crystallization of the GST films was inferred at about 140 °C. The vibrational properties of the crystalline GST layers were investigated via Raman spectroscopy with mode assignment in agreement with previous works on GST films grown on rigid substrates. The electrical characterization revealed a good homogeneity of the amorphous and crystalline trigonal GST with an electrical resistance contrast of 8 × 106.

Origin
Nanomaterials
Volume
12
Issue
12
Pages
2001
Cited by
16