Donor incomplete ionization and mobility enhancement in ultra-thin silicon-on-insulator films doped by phosphorus end-terminated polymers
Publication date: 1 Gen 2024
The injection of P atoms is studied confining the same P dose in a progressively thinner silicon-on-insulator film. To account for the incomplete ionization observed in ultra-thin samples, the effect of Si/SiO 2 interfaces must be considered.
