Few electron limit of n-type metal oxide semiconductor single electron transistors

Publication date: 3 Mag 2012

JournalSource: OPENALEXOpenAlex type: articleOpen Access
Authors: Enrico Prati, Marco De Michielis, Matteo Belli, Simone Cocco, M. Fanciulli, Dharmraj Kotekar‐Patil, Matthias Ruoff, D. P. Kern, D. Wharam, J. Verduijn, G. C. Tettamanzi, Sven Rogge, B. Roche, R. Wacquez, X. Jehl, M. Vinet, M. Sanquer

We report the electronic transport on n-type silicon single electron transistors (SETs) fabricated in complementary metal oxide semiconductor (CMOS) technology. The n-type metal oxide silicon SETs (n-MOSSETs) are built within a pre-industrial fully depleted silicon on insulator (FDSOI) technology with a silicon thickness down to 10 nm on 200 mm wafers. The nominal channel size of 20 × 20 nm(2) is obtained by employing electron beam lithography for active and gate level patterning. The Coulomb blockade stability diagram is precisely resolved at 4.2 K and it exhibits large addition energies of tens of meV. The confinement of the electrons in the quantum dot has been modeled by using a current spin density functional theory (CS-DFT) method. CMOS technology enables massive production of SETs for ultimate nanoelectronic and quantum variable based devices.

Origin
Nanotechnology
Volume
23
Issue
21
Pages
215204
Cited by
52