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Improvement of the piezoelectric response of AlN thin films through the evaluation of the contact surface potential by piezoresponse force microscopy

Publication date: 9 Set 2023

JournalSource: OPENALEXOpenAlex type: articleClosed Access
Authors: M.A. Signore, Luca Francioso, Chiara De Pascali, A. Serra, D. Manno, Gabriele Rescio, Fabio Quaranta, Enrico Melissano, Luciano Velardi
Origin
Vacuum
Volume
218
Pages
112596
Cited by
7
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