PYROELECTRIC EFFECT CONTROL: DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROHEATERS ARRAY FOR BIOMEDICAL APPLICATIONS

Publication date: 7 Ago 2018

JournalSource: OPENALEXOpenAlex type: articleClosed Access
Authors: S. Bhowmick, Orlando Leo, Giuseppe Coppola, Mariano Gioffrè, Marilena Musto, Giuseppe Rotondo, Mario Iodice

An innovative microheater array design is realized on a lithium niobate crystal, to induce a uniform pyroelectric effect on an area of 12.5 × 12.5 mm2. Thermal analyses of the device were performed both experimentally and numerically using a FLIR thermocamera and COMSOLTM Multiphysics.A series of preliminary numerical simulations were carried out to obtain the optimized design of the aforementioned specifications. The microheaters were fabricated on the + Z surface of the lithium niobate crystal using a photolithography process followed by titanium thin-film deposition. We performed on this device a series of electrothermal characterizations; the results of the measurements showed good agreement with the numerical model in terms of heat distribution, accomplishing a comparison between the thermal maps coming from the two methodologies.

Origin
Computational Thermal Sciences An International Journal
Volume
11
Issue
1-2
Pages
17-28
Cited by
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