PUBBLICAZIONI

JournalSource: OPENALEXOpenAlex type: articleClosed Access

Authors: W. M. M. Kessels, Anjana Devi, Jin‐Seong Park, Mikko Ritala, Ángel Yanguas-Gil, Claudia Wiemer

Origin

Nature Reviews Methods Primers

Volume

Issue

Cited by

Atomic layer deposition