Influence of the sputtering system's vacuum level on the properties of indium tin oxide films

Publication date: 6 Dic 2005

JournalSource: OPENALEXOpenAlex type: articleClosed Access
Authors: M. G. Zebaze Kana, Emanuele Centurioni, D. Iencinella, Caterina Summonte
Origin
Thin Solid Films
Volume
500
Issue
1-2
Pages
203-208
Cited by
28