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Latest advances in mechanical scanning probe lithography: Techniques, mechanisms, and applications in nanoscale fabrication

Publication date: 13 Apr 2026

JournalSource: OPENALEXOpenAlex type: articleClosed Access
Authors: Paolo Pellegrino, Lorenzo Vincenti, Mariafrancesca Cascione, Adriana Campa, Fabio Quaranta, Rosaria Rinaldi, Isabella Farella
Origin
Micro and Nanostructures
Volume
216
Pages
208693
Cited by
1
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