In this work, we propose a new approach to prepare surface micro-patterns in nanoscale deposited Au films. In particular, we exploit the idea to use a template confined dewetting aging not directly on the deposited Au film but on an underlying poly(methylmethacrylate) (PMMA) substrate by thermal processes. The idea consists of the following basic concepts: (a) to perform nanoscale Au film deposition assisted by micrometric templates to obtain a template confined film and (b) by low-temperature thermal processes (<400 °C) to induce a dewetting process of the PMMA to guide specific patterning effects in the top nanoscale Au film. In this approach, the Au surface pattern order is established by the template confined deposition on a micrometric scale (which is a highly efficient way to synthesize metallic surface patterns with controllable structures, large pattern areas, and to achieve a high throughput), while the …