Correction: Amato et al. Detecting Important Features and Predicting Yield from Defects Detected by SEM in Semiconductor Production. Sensors 2025, 25, 4218

Publication date: 13 Ago 2026

JournalSource: OPENALEXOpenAlex type: erratumOpen Access
Authors: Umberto Amato, Anestis Antoniadis, Italia De Feis, Anastasiia Doinychko, Irène Gijbels, Antonino La Magna, Daniele Pagano, F Piccinini, Easter S. Suviseshamuthu, Carlo Severgnini, Andres Torres, Patrizia Vasquez

In the published publication [...].

Origin
Sensors
Volume
26
Issue
16
Pages
5124
Cited by
0