Electrical properties of Schottky diodes on ammonothermal and hydride vapor phase epitaxy GaN substrates

Publication date: 22 Ago 2026

JournalSource: OPENALEXOpenAlex type: articleOpen Access
Authors: Giuseppe Greco, S. Milazzo, Pedro Fernandes Paes Pinto Rocha, T.S. Tlemcani, Patrick Fiorenza, Salvatore Ethan Panasci, F. Bartoli, E. Frayssinet, Filippo Giannazzo, D. Alquier, Y. Cordier, M. Bockowski, Fabrizio Roccaforte

Gallium nitride (GaN) homoepitaxial layers grown on Ammonothermal (Am-GaN) and Hydride Vapor Phase Epitaxy (HVPE-GaN) substrates were comparatively investigated to assess the impact of substrate quality on structural and electrical properties. Despite both substrates exhibiting smooth surfaces, the GaN layers grown on HVPE-GaN substrates exhibit higher surface roughness, defect density, and tensile strain than their Am-GaN counterparts. Vertical Ni/GaN Schottky diodes were fabricated, showing thermionic emission (TE) as the dominant mechanism in the forward current-voltage (I-V) characteristics, with homogeneous barrier heights of 1.11 eV and 0.90 eV for Am-GaN and HVPE-GaN, respectively. Under reverse bias, the Am-GaN devices I-V characteristics are well described by thermionic field emission (TFE), whereas HVPE-GaN diodes exhibit a mixed conduction mechanism involving both TFE and trap-assisted tunneling (TAT), leading to higher leakage currents. These results demonstrate a strong correlation between substrate growth technique, epitaxial quality, and Schottky barrier properties, highlighting the role of substrate in device performance.

Origin
Materials Science in Semiconductor Processing
Volume
216
Pages
111109
Cited by
0